Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope
نویسندگان
چکیده
منابع مشابه
Design and fabrication of a micromachined electrostatically suspended gyroscope
The current paper describes the design and fabrication of a micromachined electrostatically suspended gyroscope. Electrostatic levitation is employed to suspend the rotor, eliminating the mechanical bearing and thus friction effects between the rotor and the substrate, hence improving long-term stability. The rate of rotation can be measured by detecting the torque-induced displacement of the s...
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ژورنال
عنوان ژورنال: Sensors
سال: 2018
ISSN: 1424-8220
DOI: 10.3390/s18113901